Inodes Limit issue

My Server Inodes is full i have removed many files but again full anyone help me for that?

Filesystem Inodes IUsed IFree IUse% Mounted on
devtmpfs 957K 366 956K 1% /dev
tmpfs 961K 1 961K 1% /dev/shm
tmpfs 961K 611 960K 1% /run
tmpfs 961K 17 961K 1% /sys/fs/cgroup
/dev/vda1 15M 15M 0 100% /
tmpfs 961K 5 961K 1% /run/user/0

Which filesystem and how much of the space is allocated?